HORIBA堀場制作所 流量控制器D717T

HORIBA堀場制作所 流量控制器D717T

HORIBA堀場制作所 流量控制器D717T

更多詳情咨詢：13024103468 劉經理

*佳性能壓力不敏感質量流量模塊

D700T是性能*佳的壓力不敏感質量流量模塊，專為關鍵的半導體制造工藝而設計。D700T采用HORIBA CRITERION基于壓力的流量測量和控制技術，提供行業**的可重復和**的性能。此外，D700T的獨特之處在于采用**的先進流量控制算法和雙閥結構，使客戶的氣體輸送系統能夠解決多種挑戰。

概要

≤100msec全線快速穩定時間（可設為“設置”、“升壓”、“降壓”）

進出口壓力不敏感性能

先進的故障檢測，診斷壓力傳感器移位，閥座泄漏和流量精度變化

在0.15%標準價格范圍內可重復性

*佳精度規格在0.45% S.P.以內*（標準：0.8% S.P.）

更寬的工作溫度范圍（15-60°C）

*注：D700T為單氣體配置。向堀場詢問規格。

＊1  Flow rate accuracy can be guaranteed down to 0.1 SCCM N2 equivalent.
＊2  This is guaranteed value under 25 ℃ and ≤ 1 × 10-3 Pa (A).  
＊3  Setting time is MFC output signal and N2 gas at 25 ℃. Definition of setting time is 2 %S.P. or 0.05 %F.S. of the change in setting, whichever is larger. However, if the change in setting is less than 0.5 %F.S., 50 % of the change in setting.
＊4  Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec. (±10 PSI/sec.)
＊5  Zero adjustment is required to eliminate orientation influence after installation.
＊6  EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.